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Nano and Micro Systems 
Carbon-nanotube field emitters developed at JPL have produced world record current densities.
Carbon-nanotube field emitters developed at JPL have produced world record current densities.
Micromachined reflex kystrons work as oscillators to produce milliwatt-level powers at THz frequencies.
Micromachined reflex kystrons work as oscillators to produce milliwatt-level powers at THz frequencies.
These cork screw-like structures trap UV, visible and IR light and are used as highly efficient optical blacks integrated with devices.
These cork screw-like structures trap UV, visible and IR light and are used as highly efficient optical blacks integrated with devices.

Nano and Micro Systems development focuses on developing nano and microsensors, microactuators, and miniature systems for space exploration. The broader objective of the group is to develop, infuse, and support sub-components, components, and systems for miniature in-situ as well as remote sensing instruments that significantly enhance the returns of robotic exploration missions, primarily, and space exploration, in general.

There are three main ongoing areas of work: 1) Electron beam-based miniature instrument components, 2) Microgyroscopes, and 3) Micro and nano sensors. High-current density carbon nanotube field emitters form the fundamental component of electron beam-based miniature instruments. Using a bundle array concept, high performance cold cathodes that can operate at low voltages, in poorer vacuums, and at room temperatures have been developed for applications in future mineralogy instruments, miniature mass spectrometers, and vacuum electronics.

Using unconventional materials, advanced microgyroscopes are being developed for NASA and defense applications. New technologies to micromachine and vacuum package different resonating elements are being developed. This technology, in addition to superior performance, offers significant mass, power and volume savings.

Micro and nano sensors that use III-V compound semiconductors and single-walled carbon nanotubes form the third area of emphasis. Microsensors for extreme environment, such as Venus, as well as for defense applications to detect hazardous chemicals are being developed. In addition, advanced nanoelectronics for high frequency, and high-sensitivity, wide dynamic range vacuum gauges for microcavity applications are under development.


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